Chip Manufacturing

Back-End Defect Inspection

ICOS WI-3x00
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Product Description

The WI-3x00 Wafer Inspector is the first bump inspection system available on the market that is both extremely accurate and fast, making 100% inspection of bumped wafers possible. This bump inspection system combines surface inspection and 2D/3D bump inspection in one high speed pass. Bump inspection covers for example solder and gold bumps and UBM.
The WI-3200 bump inspection system is a manual loading system, and inspects for bumps on any wafer type without hardware changeover, including whole wafers from 2 to 8 inches. The WI-3300 bump inspection system is fully automated, and measures whole wafers from 8 to 12 inches.

Applications:

  • 2D/3D bump metrology
  • Solder bump inspection
  • Gold bump inspection
  • UBM (Under Bump Metallization)
  • Surface inspection

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