Lithography Glossary

Written by Chris Mack
Brought to you by the creators of PROLITH


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ernike Coefficients
The coefficients of the Zernike polynomial.

Example: Knowledge of the Zernike coefficients across the field is essential to fully characterizing lens performance.

Zernike Polynomial
A specific orthonormal polynomial, usually cut off at 36 terms, used to fit the wavefront error of a lens for a given field point. This polynomial characterizes the aberrations of the lens. (Named after Nobel prize-winner Fritz Zernike.)

Example: The Zernike polynomial not only provides a convenient function for fitting a measured wavefront error, but the individual terms of the polynomial have physical significance.

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For further glossary terms related to lithography, consult:
The SEMATECH Official Dictionary

SEMI Standards M1-94, P5-94, P18-92, P19-92, P21-92, and P25-94


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