Rick Wallace
Chief Executive Officer and President

Rick Wallace serves as the chief executive officer and president of KLA-Tencor Corporation as well as a member of the company’s board of directors. He began as an applications engineer at KLA Instruments in 1988, and has held various general management positions throughout his 24-year tenure with the company. Earlier in his career, he held positions with Ultratech Stepper and Cypress Semiconductor.

Wallace currently serves on the boards of directors for NetApp, Inc., a data management solutions company; Semiconductor Equipment and Materials International (SEMI), a prominent industry organization; and the Silicon Valley Leadership Group, an organization focused on issues, programs and campaigns that affect the economic health and quality of life in the Silicon Valley.

Wallace earned his Bachelor of Science degree in electrical engineering from the University of Michigan and his Master of Science degree in engineering management from Santa Clara University.

altBren Higgins
Chief Financial Officer

Bren Higgins has served as chief financial officer for KLA-Tencor since August 2013. He is responsible for overseeing and managing the company’s corporate finance, operational finance, investor relations and corporate control processes.

Higgins began his tenure at KLA-Tencor in 1999 in corporate finance, supporting the company’s financial planning and analysis (FP&A), and investor relations activities. Higgins also held multiple division controller roles, including the Reticle and Photomask Inspection Division (RAPID) and Wafer Inspection Group (WIG). He then moved on to assume the role of group controller for the Wafer Inspection and Lithography Groups.

After six years in operations finance, Higgins transitioned back into corporate finance, holding the position of senior director of financial planning and analysis for three years before serving as senior director of corporate finance from August 2011 to January 2012. Higgins was then promoted to vice president of corporate finance at KLA-Tencor in January 2012. In his most recent position, Higgins was responsible for treasury, investor relations and supporting the company’s business development activities.

Higgins earned his bachelor’s degree in political science with an emphasis in public service from the University of California at Santa Barbara and his master’s degree in finance from the University of California at Davis.


alt Ben Tsai, Ph.D.
Chief Technology Officer and Executive Vice President of Corporate Alliances

Ben Tsai, Ph.D., is the chief technology officer (CTO) and executive vice president of corporate alliances at KLA-Tencor. He is responsible for spearheading KLA-Tencor’s technology roadmap, business development, corporate alliances and venture investments.

Tsai has spent more than 20 years at KLA-Tencor in various technology and business leadership positions. During his tenure at the company he has served as vice president and general manager of the WIN division and in 1994 was appointed to CTO when the company was operating as KLA Instruments. Previously, he also served as senior vice president of technology at Tokyo Electron Limited.

Tsai has held advisory roles with Ultratech Inc., and Varian Semiconductor Associates, where he served on each company’s board of directors. Additionally, he holds more than 40 patents in the areas of inspection and metrology.

Tsai received his bachelor’s degree in electrical engineering from the National Taiwan University, and his master’s degree and doctorate in electrical engineering from the University of Illinois at Urbana-Champaign.

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