Lithography Modeling


Researchers at advanced IC manufacturers, stepper companies, track companies, and material providers use virtual lithography modeling and simulation software to explore critical-feature designs, manufacturability and process-limited yield of proposed lithographic technologies without the time and expense of printing hundreds of test wafers using experimental materials and prototype process equipment.

  • PROLITH: Lithography simulation tool designed for R&D scientists and engineers
  • ProDATA: Critical-dimension (CD) analysis tool


Related Products

Follow us on