featured products

  • 8900 - High speed patterned-wafer defect inspection system suitable for detecting a wide variety of defects in the sub-micron to five-micron range, for image-sensor development and production as well as other applications
  • Teron 600 - Reticle defect inspection platform with the sensitivity, flexibility and computational lithography power to enable development and manufacturing of reticles to support the wide variety of 2Xnm lithography schemes
  • 2830 Series - Brightfield inspection platform with PowerBroadband™, a revolutionary high-brightness light source that enables more repeatable capture of difficult defects for accelerated ramp of leading-edge devices.
  • Puma 9500 Series - Darkfield inspection platform with innovative opto-electronic technology, providing twice the resolution and twice the speed of previous-generation Puma tools, for high performance excursion monitoring.

We Partner with Our Customers

to develop solutions tailored to their objectives

Results:

  • A faster path from data to decisions
  • Quicker response to changes in the market
  • Reliable, high performance products
  • Higher profitability and ROI
That`s the value of working with KLA-Tencor

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