featured products
- CIRCL – All-surface, macro defect inspection, metrology and review cluster tool with parallel processing for high efficiency production monitoring of IC devices.
- 2900 Series – Broadband optical wafer defect inspectors extend optical inspection to new limits, enabling capture of yield-critical defects on challenging process layers and die areas for advanced design rule IC devices.
- Puma 9650 – Narrowband optical wafer defect inspection system provides improved sensitivity and noise control for exceptional defect capture in yield-critical die areas on leading-edge IC devices.
- eS800 – Electron-beam wafer defect inspection system offers leading-edge physical and electrical defect capture on a wide range of layers and structures on advanced design node IC devices.
- LMS IPRO5 - Reticle pattern placement metrology system ensuring pattern placement accuracy on the mask for the 20nm node.
EMERGING MARKETS
- KLA-Tencor is extending its expertise in process control and yield management to provide solutions to the LED and Solar industries. Find out more:
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- A faster path from data to decisions
- Quicker response to changes in the market
- Reliable, high performance products
- Higher profitability and ROI
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